MProbe: Thin-film measurement system - SemiconSoft.Inc
Majority of translucent or lightly absorbing films can be measured quickly and reliably:Oxides,Nitrides, Photoresists, Polymers, Semiconductors (Si, aSi, polySi), Compound Semiconductors (AlGaAs, InGaAs, CdTe,CIGS),Hard coatings (SiC, DLC), Polymer coatings (Paralene, PMMA, Polyamides), thin metal films and many more.
Thickness Range: 1 nm - 1 mm
Wavelength Range: 200nm -5000nm
Thin Solar Cells applications: aSi, TCO, CIGS, CdS, CdTe - full solar stack measurement
LCD, FPD application: ITO, Cell Gaps, Polyamides. Optical Coatings: dielectric filters, hardness coating, anti-reflection coating Semiconductor and dielectics: Oxides, Nitrides, OLED stack
Real time measurement: and analysis. Multi-layer, thin,thick, freestanding and nonuniform layers.
Extensive materials library (500+ materials) - new materials easily added. Support of parameterized materials: Cauchy, Tauc-Lorentz, Cody-Lorentz, EMA
and many more....
Flexible: Desktop or in-situ, R&D on inline. Easy integration with external system using TCP or Modbus interface
Measurement: thickness, optical constants, surface roughness
User friedly and powerful: One-click measurement and analysis. Powerful tools: simulation & sensitivity, background and scaling correction,linked layers and materials, multisample measurements, dynamic measurement and production batch processing.