Celerity
1463 Centre Point Dr
Milpitas CA California
United States 95035
Milpitas CA California
United States 95035
Phone:
+1 408 935 4550, Fax: +1 408 935 7425
Tags:
peristaltic pumps transducers
Celerity :: Celerity, Inc. – global provider of precision instruments and systems integration solutions Celerity Search Select your language Site Main Menu Blend + Dispense Systems Chemical Blending + Distribution Slurry Blending + Distribution Flow Measurement + Control Gas Delivery Liquid Delivery Vapor Delivery Pressure Measurement + Display Pressure Transducers Pressure Gauges Pressure Displays/Controllers Cylinder Scales Thermal Measurement + Control Temperature Sensors Heaters Control Systems Vacuum Measurement + Control Capacitance Manometers Chamber Pressure Control Systems New Product Details Demo Celerity’s long history of working with the processes and technologies both around the tool and in the sub-fab gives...undefined Gas Delivery Modules Liquid Delivery Modules Vapor Delivery Modules More Technology drives development toward the next generation of semiconductor and electronics... More Semiconductors Flat Panel Displays Magnetic and Optical Storage Devices Micro-Electro Mechanical Systems (MEMS) Complementary Metal–Oxide–Semiconductor (CMOS) Solar/Photovoltaics (PV) More The Celerity Unit 125 integrated flow controller achieves unprecedented setpoint response time, enhanced accuracy, and industry-proven flow stabilization by combining thermal and pressure sensor technologies with primary gas calibration metrology. The result is faster recipe stabilization time, improved set point accuracy and configurable gas and flow capabilities. These capabilities are enabling for etch processes, MEMS / nanotechnology, low vapor pressure and reactive chemistries. Benefits: Fast recipe stabilization time Elimination of pressure transient effects Improved setpoint accuracy Reduced MFC part stocking requirements Reduced gas abatement costs Unit 125 Demo Terms Of Use Privacy Policy Sitemap Copyright 2007 Celerity, Inc. All rights reserved. Celerity Prevails in Patent Infringement Lawsuit Against Ultra Clean More SEMICON Europa 2007 Date: October 9 - 11, 2007 Venue: New Stuttgart Trade Fair Centre Location:
